Fabrication of silicon 3D taper structures for optical fibre to chip interface

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	1248-1251
Seitenumfang	4
Fachzeitschrift	Microelectronic Engineering
Volume	84
Ausgabenummer	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.156
Publikationsstatus	Veröffentlicht - Mai 2007

Wissenschaftszweige

@article{7ebf103061c140dc8b6692e68d02f085,

title = "Fabrication of silicon 3D taper structures for optical fibre to chip interface",

author = "Roman Holly and P. Hudek and R. Merz and Kurt Hingerl",

year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.156",

language = "English",

volume = "84",

pages = "1248--1251",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "ELSEVIER SCIENCE BV",

number = "5-8",

}

TY - JOUR

T1 - Fabrication of silicon 3D taper structures for optical fibre to chip interface

AU - Holly, Roman

AU - Hudek, P.

AU - Merz, R.

AU - Hingerl, Kurt

PY - 2007/5

Y1 - 2007/5

UR - https://www.scopus.com/pages/publications/34247632161

U2 - 10.1016/j.mee.2007.01.156

DO - 10.1016/j.mee.2007.01.156

M3 - Article

SN - 1873-5568

VL - 84

SP - 1248

EP - 1251

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -