@article{59f86667638b45b195ca40682cea2d1f,
title = "Equalising stamp and substrate deformations in solid parallel-plate UV-based nanoimprint lithography",
author = "Iris Bergmair and Rainer Sch{\"o}ftner and Michael M{\"u}hlberger and Markus Gusenbauer and Kurt Hingerl",
year = "2008",
month = may,
doi = "10.1016/j.mee.2007.12.079",
language = "English",
volume = "85",
pages = "822--824",
journal = "Microelectronic Engineering",
issn = "1873-5568",
publisher = "ELSEVIER SCIENCE BV",
number = "5-6",
}