@inproceedings{431a5cd7f4664fceadf17370890ec060,
title = "Epitaxy - close and far away from thermodynamic equilibrium",
author = "Helmut Sitter",
year = "2002",
doi = "10.1109/ASDAM.2002.1088499",
language = "English",
isbn = "0-7803-726-x",
series = "ASDAM 2002 - Conference Proceedings, 4th International Conference on Advanced Semiconductor Devices and Microsystems",
pages = "161--174",
editor = "Daniel Donoval and Juraj Breza",
booktitle = "ASDAM 2002 - Conference Proceedings, 4th International Conference on Advanced Semiconductor Devices and Microsystems",
}