Epitaxial growth at high rates with LEPECVD

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@article{d48e2a08e23a432f8b77d2891dc913c8,

title = "Epitaxial growth at high rates with LEPECVD",

author = "G{\"u}nther Bauer and T. Graf and \{von K{\"a}nel\}, H. and C. Rosenblad and J. Schulze and Julian Stangl and Y. Zhuang",

year = "1998",

month = dec,

day = "30",

doi = "10.1016/S0040-6090(98)01216-4",

language = "English",

volume = "336",

pages = "89--91",

journal = "Thin Solid Films",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Epitaxial growth at high rates with LEPECVD

AU - Bauer, Günther

AU - Graf, T.

AU - von Känel, H.

AU - Rosenblad, C.

AU - Schulze, J.

AU - Stangl, Julian

AU - Zhuang, Y.

PY - 1998/12/30

Y1 - 1998/12/30

UR - https://www.scopus.com/pages/publications/0032309465

U2 - 10.1016/S0040-6090(98)01216-4

DO - 10.1016/S0040-6090(98)01216-4

M3 - Article

VL - 336

SP - 89

EP - 91

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -