@article{5fadda6609d147abaae7b84fb7c66da9,
title = "Diffusion and clustering of supersaturated carbon in SiGeC layers under oxidation",
author = "A. Coati and Julian Stangl and G{\"u}nther Bauer and C. Spinella and \{De Salvador\}, D. and Sturm, \{James C.\} and M. Berti and M.S. Carroll and A.V. Drigo and E. Napolitani",
year = "2002",
month = jan,
doi = "10.1016/S0168-583X(01)00868-0",
language = "English",
volume = "186",
pages = "212--217",
journal = "Nuclear Instruments and Methods in Physics Research Section B",
issn = "1872-9584",
publisher = "Elsevier",
number = "1-4",
}