Diffuse x-ray reflectivity from self-assembled ripples with superimposed roughness in Si/Ge superlattices

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	480-486
Seitenumfang	7
Fachzeitschrift	Semiconductor Science and Technology
Volume	17
Ausgabenummer	5
DOIs	https://doi.org/10.1088/0268-1242/17/5/313
Publikationsstatus	Veröffentlicht - Mai 2002

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@article{3d62821bcc194b2982c1ed002a43a441,

title = "Diffuse x-ray reflectivity from self-assembled ripples with superimposed roughness in Si/Ge superlattices",

author = "Mojmir Meduna and Vaclav Holy and T. Roch and G{\"u}nther Bauer and Schmidt, \{Oliver G.\} and K. Eberl",

year = "2002",

month = may,

doi = "10.1088/0268-1242/17/5/313",

language = "English",

volume = "17",

pages = "480--486",

journal = "Semiconductor Science and Technology",

publisher = "IOP Publishing",

number = "5",

}

TY - JOUR

T1 - Diffuse x-ray reflectivity from self-assembled ripples with superimposed roughness in Si/Ge superlattices

AU - Meduna, Mojmir

AU - Holy, Vaclav

AU - Roch, T.

AU - Bauer, Günther

AU - Schmidt, Oliver G.

AU - Eberl, K.

PY - 2002/5

Y1 - 2002/5

UR - https://www.scopus.com/pages/publications/0036566773

U2 - 10.1088/0268-1242/17/5/313

DO - 10.1088/0268-1242/17/5/313

M3 - Article

VL - 17

SP - 480

EP - 486

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

IS - 5

ER -