Determining the Thin-Film Thermal Conductivity of Low Temperature PECVD Silicon Nitride

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Wissenschaftszweige

@inproceedings{e62dcd1520a24e57809ed4ec1410826f,

title = "Determining the Thin-Film Thermal Conductivity of Low Temperature PECVD Silicon Nitride",

author = "Artur Jachimowicz and Bernhard Jakoby and F. Kohl and Jochen Kuntner",

year = "2006",

month = sep,

language = "English",

isbn = "91-631-9280-2",

booktitle = "Proc. Eurosensors 2006",

}