Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

Publikation: Beitrag in Fachzeitschrift › Konferenzartikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	437-441
Seitenumfang	5
Fachzeitschrift	Nuclear Instruments and Methods in Physics Research Section B
Volume	175-177
DOIs	https://doi.org/10.1016/S0168-583X(00)00557-7
Publikationsstatus	Veröffentlicht - Apr. 2001

Wissenschaftszweige

@article{d276ce8bda32405d978694cd8b12b3b5,

title = "Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions",

author = "V. Hnatowicz and V. Perina and A. Mackova and Vaclav Svorcik and V. Rybka and D. Fink and Johannes Heitz",

year = "2001",

month = apr,

doi = "10.1016/S0168-583X(00)00557-7",

language = "English",

volume = "175-177",

pages = "437--441",

journal = "Nuclear Instruments and Methods in Physics Research Section B",

issn = "1872-9584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

AU - Hnatowicz, V.

AU - Perina, V.

AU - Mackova, A.

AU - Svorcik, Vaclav

AU - Rybka, V.

AU - Fink, D.

AU - Heitz, Johannes

PY - 2001/4

Y1 - 2001/4

UR - https://www.scopus.com/pages/publications/0035301870

U2 - 10.1016/S0168-583X(00)00557-7

DO - 10.1016/S0168-583X(00)00557-7

M3 - Conference article

SN - 1872-9584

VL - 175-177

SP - 437

EP - 441

JO - Nuclear Instruments and Methods in Physics Research Section B

JF - Nuclear Instruments and Methods in Physics Research Section B

ER -