Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator

Martin Heinisch; Thomas Voglhuber-Brunnmaier; Erwin Reichel; Stefan Clara; Ali Abdallah; Bernhard Jakoby

doi:10.1109/MESS.2014.7010256

Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator

Martin Heinisch
, Thomas Voglhuber-Brunnmaier
, Erwin Reichel
, Stefan Clara
, Ali Abdallah
, Bernhard Jakoby

Institut für Mikroelektronik und Mikrosensorik

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Abstract

In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.

Originalsprache	Englisch
Titel	Proceedings of the Microelectronic Systems Symposium 2014
Seitenumfang	5
ISBN (elektronisch)	9781479953264
DOIs	https://doi.org/10.1109/MESS.2014.7010256
Publikationsstatus	Veröffentlicht - Mai 2014

Publikationsreihe

Name	2014 Microelectronic Systems Symposium, MESS 2014 - Conference Proceedings

Wissenschaftszweige

202019 Hochfrequenztechnik
202021 Industrielle Elektronik
202036 Sensorik
203017 Mikromechanik
202 Elektrotechnik, Elektronik, Informationstechnik
202027 Mechatronik
202028 Mikroelektronik
202037 Signalverarbeitung

JKU-Schwerpunkte

Mechatronics and Information Processing

Zugriff auf Dokument

10.1109/MESS.2014.7010256

Andere Dateien und Links

Verknüpfung zur Publikation in Scopus

Dieses zitieren

Heinisch, M., Voglhuber-Brunnmaier, T., Reichel, E., Clara, S., Abdallah, A., & Jakoby, B. (2014). Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator. in Proceedings of the Microelectronic Systems Symposium 2014 Artikel 7010256 (2014 Microelectronic Systems Symposium, MESS 2014 - Conference Proceedings). https://doi.org/10.1109/MESS.2014.7010256

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abstract = "In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.",

author = "Martin Heinisch and Thomas Voglhuber-Brunnmaier and Erwin Reichel and Stefan Clara and Ali Abdallah and Bernhard Jakoby",

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Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator. / Heinisch, Martin; Voglhuber-Brunnmaier, Thomas; Reichel, Erwin et al.
Proceedings of the Microelectronic Systems Symposium 2014. 2014. 7010256 (2014 Microelectronic Systems Symposium, MESS 2014 - Conference Proceedings).

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

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AU - Abdallah, Ali

AU - Jakoby, Bernhard

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