Characterization of the element distribution within TiN coatings with SIMS

Publikation: Andere Beiträge › Sonstiger Beitrag

Name	Mikrochimica Acta
ISSN (Druck)	0026-3672

Wissenschaftszweige

@misc{bf8f6516841a4f2892fbf6b660c7a5b0,

title = "Characterization of the element distribution within TiN coatings with SIMS",

author = "Thomas Kolber and Kurt Piplits and Leopold Palmetshofer and H. Hutter",

year = "2000",

doi = "10.1007/s006040070025",

language = "English",

volume = "135",

series = "Mikrochimica Acta",

edition = "1-2",

type = "Other",

}