@article{9f9feab328914e15a441de8e21568daa,
title = "Aqueous marker penetration into ion irradiated polyimide",
author = "Leopold Palmetshofer and D. Fink and M. M{\"u}ller and R. Klett and Andreas Hartl and J. Vacik and J. Cervena and L.T. Chadderton and V. Hnatowicz",
year = "2002",
month = may,
doi = "10.1016/S0168-583X(02)00629-8",
language = "English",
volume = "191",
pages = "662--668",
journal = "Nuclear Instruments and Methods in Physics Research Section B",
issn = "1872-9584",
publisher = "Elsevier",
number = "1-4",
}