A Novel Micromachined Liquid Property Sensor Utilizing a Doubly Clamped Vibrating Beam

Erwin Reichel; Bernhard Weiß; Christian Riesch; Artur Jachimowicz; Bernhard Jakoby

A Novel Micromachined Liquid Property Sensor Utilizing a Doubly Clamped Vibrating Beam

Erwin Reichel
, Bernhard Weiß
, Christian Riesch
, Artur Jachimowicz
, Bernhard Jakoby

Institut für Mikroelektronik und Mikrosensorik

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Abstract

A novel miniaturized sensor for the online measurement of the mechanical properties of a viscous liquid utilizing a resonating beam has been designed and fabricated in silicon technology. The modeling of the electromagnetic actuation of the device is discussed and the response of a first prototype was experimentally characterized using impedance spectroscopy.

Originalsprache	Englisch
Titel	Eurosensors XX Proceedings 2006
Herausgeber*innen	Eurosensors
Seiten	M2B-P32
Seitenumfang	4
Band	1
Publikationsstatus	Veröffentlicht - Sep. 2006

Wissenschaftszweige

202 Elektrotechnik, Elektronik, Informationstechnik
202019 Hochfrequenztechnik
202021 Industrielle Elektronik
202027 Mechatronik
202028 Mikroelektronik
202036 Sensorik
202037 Signalverarbeitung
203017 Mikromechanik
502058 Digitale Transformation

Dieses zitieren

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abstract = "A novel miniaturized sensor for the online measurement of the mechanical properties of a viscous liquid utilizing a resonating beam has been designed and fabricated in silicon technology. The modeling of the electromagnetic actuation of the device is discussed and the response of a first prototype was experimentally characterized using impedance spectroscopy.",

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