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A Measurement Setup for Sensing Viscosity and Mass Density of Liquids Accomodating Different Resonator Sensor Principles

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

Abstract

In this work we present a novel experimental setup for measuring liquid properties utilizing three different acoustic sensors. We compare the applicability and associated measurement results for electromagnetically excited cantilever and membrane or plate resonators, as well as a quartz crystal resonator. This work aims at comparing the characteristics of these different sensor principles. The setup combines suitable liquid reservoirs for all three sensors in a temperature-stabilized environment.
OriginalspracheEnglisch
TitelTagungsband zur Informationstagung Mikroelektronik 08
Herausgeber*innen OVE
Seiten164-168
Seitenumfang5
PublikationsstatusVeröffentlicht - Okt. 2008

Publikationsreihe

NameOVE Schriftenreihe

Wissenschaftszweige

  • 202036 Sensorik

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