A Laser Micromachining Projection Microscope

K. Osvay; Z. Bor; B. Racz; Johannes Heitz; I.N. Ross

doi:10.1117/12.2308737

A Laser Micromachining Projection Microscope

K. Osvay
, Z. Bor
, B. Racz
, Johannes Heitz
, I.N. Ross

Institut für Angewandte Physik

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

Originalsprache	Englisch
Titel	16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Herausgeber*innen	Gy Akos, T. Lippenyi, G. Lupkovics, A. Podmaniczky
Seiten	751-752
Seitenumfang	2
Band	1983
DOIs	https://doi.org/10.1117/12.2308737
Publikationsstatus	Veröffentlicht - 1993

Publikationsreihe

Name	Proceedings of SPIE - The International Society for Optical Engineering
Nummer	pt 2
Band	1983
ISSN (Print)	0277-786X

UN SDGs

Dieser Output leistet einen Beitrag zu folgendem(n) Ziel(en) für nachhaltige Entwicklung

SDG 9 – Industrie, Innovation und Infrastruktur

Wissenschaftszweige

103016 Laserphysik
103020 Oberflächenphysik
103 Physik, Astronomie
103008 Experimentalphysik
103021 Optik
103023 Polymerphysik

JKU-Schwerpunkte

TNF Allgemein

Zugriff auf Dokument

10.1117/12.2308737

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Osvay, K., Bor, Z., Racz, B., Heitz, J., & Ross, I. N. (1993). A Laser Micromachining Projection Microscope. in G. Akos, T. Lippenyi, G. Lupkovics, & A. Podmaniczky (Hrsg.), 16th Congress of the International Commission for Optics: Optics as a Key to High Technology (Band 1983, S. 751-752). (Proceedings of SPIE - The International Society for Optical Engineering; Band 1983, Nr. pt 2). https://doi.org/10.1117/12.2308737

@inproceedings{73ff7ea7e7e14a29a428da4f1ef7d0ac,

title = "A Laser Micromachining Projection Microscope",

author = "K. Osvay and Z. Bor and B. Racz and Johannes Heitz and I.N. Ross",

year = "1993",

doi = "10.1117/12.2308737",

language = "English",

isbn = "0819412309",

volume = "1983",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

number = "pt 2",

pages = "751--752",

editor = "Gy Akos and T. Lippenyi and G. Lupkovics and A. Podmaniczky",

booktitle = "16th Congress of the International Commission for Optics: Optics as a Key to High Technology",

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Osvay, K, Bor, Z, Racz, B, Heitz, J & Ross, IN 1993, A Laser Micromachining Projection Microscope. in G Akos, T Lippenyi, G Lupkovics & A Podmaniczky (Hrsg.), 16th Congress of the International Commission for Optics: Optics as a Key to High Technology. Bd. 1983, Proceedings of SPIE - The International Society for Optical Engineering, Nr. pt 2, Bd. 1983, S. 751-752. https://doi.org/10.1117/12.2308737

A Laser Micromachining Projection Microscope. / Osvay, K.; Bor, Z.; Racz, B. et al.
16th Congress of the International Commission for Optics: Optics as a Key to High Technology. Hrsg. / Gy Akos; T. Lippenyi; G. Lupkovics; A. Podmaniczky. Band 1983 1993. S. 751-752 (Proceedings of SPIE - The International Society for Optical Engineering; Band 1983, Nr. pt 2).

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

TY - GEN

T1 - A Laser Micromachining Projection Microscope

AU - Osvay, K.

AU - Bor, Z.

AU - Racz, B.

AU - Heitz, Johannes

AU - Ross, I.N.

PY - 1993

Y1 - 1993

UR - https://www.scopus.com/pages/publications/0027866034

U2 - 10.1117/12.2308737

DO - 10.1117/12.2308737

M3 - Conference proceedings

SN - 0819412309

VL - 1983

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 751

EP - 752

BT - 16th Congress of the International Commission for Optics: Optics as a Key to High Technology

A2 - Akos, Gy

A2 - Lippenyi, T.

A2 - Lupkovics, G.

A2 - Podmaniczky, A.

ER -

Osvay K, Bor Z, Racz B, Heitz J, Ross IN. A Laser Micromachining Projection Microscope. in Akos G, Lippenyi T, Lupkovics G, Podmaniczky A, Hrsg., 16th Congress of the International Commission for Optics: Optics as a Key to High Technology. Band 1983. 1993. S. 751-752. (Proceedings of SPIE - The International Society for Optical Engineering; pt 2). doi: 10.1117/12.2308737